The use of laser printers for obtaining photomasks for the photolithography process

Kazimierz Gut; Sebastian Student

doi:10.1117/12.2539416

The use of laser printers for obtaining photomasks for the photolithography process

Wyniki badań: Rozdział w książce/raport/materiał konferencyjny › Wkład w konferencję › recenzja

Abstrakt

For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.

Język oryginału	angielski
Tytuł publikacji goszczącej	14th Conference on Integrated Optics
Podtytuł publikacji goszczącej	Sensors, Sensing Structures, and Methods
Redaktorzy	Przemyslaw Struk, Tadeusz Pustelny
Wydawca	SPIE
ISBN (elektroniczny)	9781510631502
Identyfikatory DOI	https://doi.org/10.1117/12.2539416
Status publikacji	Opublikowano - 2019
Wydarzenie	14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019 - Szcyzyrk, Polska Czas trwania: 25 lut 2019 → 1 mar 2019

Seria publikacji

Nazwa	Proceedings of SPIE - The International Society for Optical Engineering
Tom	11204
ISSN (drukowany)	0277-786X
ISSN (elektroniczny)	1996-756X

Konferencja

Konferencja	14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019
Kraj/Terytorium	Polska
Miejscowość	Szcyzyrk
Okres	25/02/19 → 1/03/19

Cele SDG ONZ

Ten wynik przyczynia się do realizacji następujących celów zrównoważonego rozwoju

Cel 9 Przemysł, innowacje i infrastruktura

Obszary tematyczne ASJC Scopus

Materiały elektroniczne, optyczne i magnetyczne
Fizyka materii skondensowanej
Zastosowania informatyki
Matematyka stosowana
Inżynieria elektryczna i elektroniczna

Uzyskaj dostęp do dokumentu

10.1117/12.2539416

Inne pliki i linki

Link do publikacji w Scopus

Cytowanie

Gut, K., & Student, S. (2019). The use of laser printers for obtaining photomasks for the photolithography process. W P. Struk, & T. Pustelny (Red.), 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods Artykułu 112040J (Proceedings of SPIE - The International Society for Optical Engineering; Tom 11204). SPIE. https://doi.org/10.1117/12.2539416

@inproceedings{517764ec57bf40c1b96eee9c24522324,

title = "The use of laser printers for obtaining photomasks for the photolithography process",

abstract = "For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.",

keywords = "Low-cos microfabrication, MEMS, SU-8, UV photolithography",

author = "Kazimierz Gut and Sebastian Student",

note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019 ; Conference date: 25-02-2019 Through 01-03-2019",

year = "2019",

doi = "10.1117/12.2539416",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Przemyslaw Struk and Tadeusz Pustelny",

booktitle = "14th Conference on Integrated Optics",

address = "United States",

}

Gut, K & Student, S 2019, The use of laser printers for obtaining photomasks for the photolithography process. w P Struk & T Pustelny (red), 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods., 112040J, Proceedings of SPIE - The International Society for Optical Engineering, tom 11204, SPIE, 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019, Szcyzyrk, Polska, 25/02/19. https://doi.org/10.1117/12.2539416

The use of laser printers for obtaining photomasks for the photolithography process. / Gut, Kazimierz ; Student, Sebastian.
14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods. red. / Przemyslaw Struk; Tadeusz Pustelny. SPIE, 2019. 112040J (Proceedings of SPIE - The International Society for Optical Engineering; Tom 11204).

Wyniki badań: Rozdział w książce/raport/materiał konferencyjny › Wkład w konferencję › recenzja

TY - GEN

T1 - The use of laser printers for obtaining photomasks for the photolithography process

AU - Gut, Kazimierz

AU - Student, Sebastian

PY - 2019

Y1 - 2019

N2 - For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.

AB - For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.

KW - Low-cos microfabrication

KW - MEMS

KW - SU-8

KW - UV photolithography

UR - https://www.scopus.com/pages/publications/85073693344

U2 - 10.1117/12.2539416

DO - 10.1117/12.2539416

M3 - Conference contribution

AN - SCOPUS:85073693344

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - 14th Conference on Integrated Optics

A2 - Struk, Przemyslaw

A2 - Pustelny, Tadeusz

PB - SPIE

T2 - 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019

Y2 - 25 February 2019 through 1 March 2019

ER -

The use of laser printers for obtaining photomasks for the photolithography process

Abstrakt

Seria publikacji

Konferencja

Cele SDG ONZ

Obszary tematyczne ASJC Scopus

Uzyskaj dostęp do dokumentu

Inne pliki i linki

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Cytowanie