Swept-source optical coherence tomography microsystem with an integrated Mirau interferometer and electrothermal micro-scanner

In the rapid evolution of gastrointestinal endomicroscopy, optical coherence tomography (OCT) has found many diverse applications. Until recently, the micro-opto–electro-mechanical systems (MOEMS) technology has been playing a key role in shaping the miniaturization of these components. We report here, to the best of our knowledge, a novel endoscopic microsystem. It is based on a spectrally tuned MOEMS Mirau micro-interferometer integrated with micro-electro-mechanical systems (MEMS) electro-thermal micro-scanner, operating in the regime of swept-source (SS) OCT imaging. This Letter validates our initial proof-of-concept toward the development of such MOEMS probe and the presentation of experimental performances of the resulting SS-OCT microsystem.