Abstrakt
Purpose - The main aim of this study was a preparation development of dopant solution (DS) which can be deposited by a spray-on method and subsequently allows obtaining the no emitter layer with surface resistance in the range of 65-80 ω1. The intention of chosen spray-on method was to gain a cheaper way of dopant source deposition, compared to the commonly used methods, which is of particular importance for the new low-cost production processes. Design/methodology/approach - This paper presents the sequence in producing a spray-on glass solution (DS) with very high concentration of phosphorus, which allows to perform diffusion doping at relatively low temperatures. DS contained deionized water, ethyl alcohol, tetraethoxysilane and othophosphoric acid. Findings - The sequence in producing a DS was performed with respect to enabling the application to silicon wafers by spray-on method. Furthermore, the equations defined density and viscosity of DS in term of storage time were referred to determine the possibility of applying this solution by spray-on method. Besides, the dependence of the emitter surface resistance on the doping (diffusion) time was determined. Accordingly, optimal process conditions were specified. Originality/value - The paper presents a new, so far unpublished composition of DS with very high concentration of phosphorus, which can be applied using a spray-on method. Moreover, original are also investigations respecting some properties of obtained DS relative to storage time.
| Język oryginału | angielski |
|---|---|
| Strony (od–do) | 149-153 |
| Liczba stron | 5 |
| Czasopismo | Microelectronics International |
| Tom | 34 |
| Numer wydania | 3 |
| Identyfikatory DOI | |
| Status publikacji | Opublikowano - 2017 |
Cele SDG ONZ
Ten wynik przyczynia się do realizacji następujących celów zrównoważonego rozwoju
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Cel 7 Przystępna i czysta energia
Obszary tematyczne ASJC Scopus
- Materiały elektroniczne, optyczne i magnetyczne
- Fizyka atomowa i molekularna oraz optyka
- Fizyka materii skondensowanej
- Powierzchnie, powłoki i filmy
- Inżynieria elektryczna i elektroniczna
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