Single-mode Rib waveguides fabricated by means of sol-gel method

P. Karasiński; C. Tyszkiewicz; R. Rogoziński

doi:10.12693/APhysPolA.118.1168

Single-mode Rib waveguides fabricated by means of sol-gel method

Katedra Optoelektroniki (RE/RE4)

Wyniki badań: Wkład do czasopisma › Artykuł › recenzja

6 Cytowania z bazy Scopus

Abstrakt

Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO₂:TiO₂ which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO₂:TiO₂ was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.

Język oryginału	angielski
Strony (od–do)	1168-1170
Liczba stron	3
Czasopismo	Acta Physica Polonica A
Tom	118
Numer wydania	6
Identyfikatory DOI	https://doi.org/10.12693/APhysPolA.118.1168
Status publikacji	Opublikowano - 1 gru 2010

Obszary tematyczne ASJC Scopus

Ogólna fizyka i astronomia

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10.12693/APhysPolA.118.1168

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Cytowanie

@article{4c5619cf58a0420fba944d76edd26943,

title = "Single-mode Rib waveguides fabricated by means of sol-gel method",

abstract = "Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.",

author = "P. Karasi{\'n}ski and C. Tyszkiewicz and R. Rogozi{\'n}ski",

year = "2010",

month = dec,

day = "1",

doi = "10.12693/APhysPolA.118.1168",

language = "English",

volume = "118",

pages = "1168--1170",

journal = "Acta Physica Polonica A",

issn = "0587-4246",

publisher = "Polska Akademia Nauk",

number = "6",

}

TY - JOUR

T1 - Single-mode Rib waveguides fabricated by means of sol-gel method

AU - Karasiński, P.

AU - Tyszkiewicz, C.

AU - Rogoziński, R.

PY - 2010/12/1

Y1 - 2010/12/1

N2 - Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.

AB - Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.

UR - https://www.scopus.com/pages/publications/78650491438

U2 - 10.12693/APhysPolA.118.1168

DO - 10.12693/APhysPolA.118.1168

M3 - Article

AN - SCOPUS:78650491438

SN - 0587-4246

VL - 118

SP - 1168

EP - 1170

JO - Acta Physica Polonica A

JF - Acta Physica Polonica A

IS - 6

ER -

Single-mode Rib waveguides fabricated by means of sol-gel method

Abstrakt

Obszary tematyczne ASJC Scopus

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