@inproceedings{c179630efad6417ba472f4232f25a118,
title = "RIB waveguides fabricated by sol-gel method",
abstract = "RIB waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO 2:TiO 2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO 2:TiO 2 was carried out in water solutions of ammonia fluoride. The paper presents the determined technological characteristics, power distributions in the obtained strip waveguides and the results of theoretical analysis.",
keywords = "RIB waveguide, Silica-titania film, Sol-gel",
author = "Pawe{\l} Karasi{\'n}ski and Roman Rogozi{\'n}ski",
year = "2007",
doi = "10.1117/12.739561",
language = "English",
isbn = "0819467472",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Lightguides and Their Applications III",
note = "Lightguides and Their Applications III - 10th Conference on Technology and Application of Lightguides, TAL 2006 ; Conference date: 04-10-2006 Through 07-10-2006",
}