@inproceedings{761695a5a6bc420d8c98fe789c090bfb,
title = "Polymer planar waveguide broadband differential interferometer",
abstract = "In the paper the planar waveguide based on SU-8 polymer were made on 2μm of silica (SiO2) on silicon (Si) substrates in order to obtain base for broadband interferometer. Analysis and calculation of sensitivity for single mode broadband differential interferometer were performed. Paper presents preliminary tests and analysis of such structures. Dilution of SU-8 solution for obtaining thin layer (below 500 nm) followed by elipsometric measurements is presented.",
keywords = "SU-8, differential interferometer, glass adhesion, interferometer, planar waveguides, polymer waveguides",
author = "T. Herzog and K. Gut and Z. Opilski and P. Ka{\l}'u{\l}ski and G. Adamski",
note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016 ; Conference date: 29-05-2016 Through 06-06-2016",
year = "2016",
doi = "10.1117/12.2249384",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Romaniuk, \{Ryszard S.\}",
booktitle = "Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2016",
address = "United States",
}