Optical rib waveguides based on sol-gel derived silica-titania films

P. Karasiński; C. Tyszkiewicz; R. Rogoziński; J. Jaglarz; J.mazur

doi:10.1016/j.tsf.2011.02.064

Optical rib waveguides based on sol-gel derived silica-titania films

P. Karasiński
, C. Tyszkiewicz
, R. Rogoziński
, J. Jaglarz
, J.mazur

Katedra Optoelektroniki (RE/RE4)

Cracow University of Technology
Silesian University of Technology

Wyniki badań: Wkład do czasopisma › Artykuł › recenzja

54 Cytowania z bazy Scopus

Abstrakt

Rib channel waveguides were produced with the application of chemical wet etching of the sol-gel derived silica-titania (SiO₂-TiO₂) waveguide films. The silica-titania films were etched in water solutions of ammonia fluoride. In the etching process, the waveguide films were selectively masked with a photoresist. This paper presents the theoretical analysis of rib channel waveguides as well as the results of experimental research on slab and rib channel waveguides. For slab waveguides the attenuation of 0.15 dB/cm was obtained, and for the produced single mode rib channel waveguides, the attenuation of 1.7 dB/cm was obtained.

Język oryginału	angielski
Strony (od–do)	5544-5551
Liczba stron	8
Czasopismo	Thin Solid Films
Tom	519
Numer wydania	16
Identyfikatory DOI	https://doi.org/10.1016/j.tsf.2011.02.064
Status publikacji	Opublikowano - 1 cze 2011

Obszary tematyczne ASJC Scopus

Materiały elektroniczne, optyczne i magnetyczne
Powierzchnie i interfejsy
Powierzchnie, powłoki i filmy
Metale i stopy
Chemia materiałowa

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10.1016/j.tsf.2011.02.064

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Cytowanie

@article{ffc6bdcc8d384378a90412ec3fa25c97,

title = "Optical rib waveguides based on sol-gel derived silica-titania films",

abstract = "Rib channel waveguides were produced with the application of chemical wet etching of the sol-gel derived silica-titania (SiO2-TiO2) waveguide films. The silica-titania films were etched in water solutions of ammonia fluoride. In the etching process, the waveguide films were selectively masked with a photoresist. This paper presents the theoretical analysis of rib channel waveguides as well as the results of experimental research on slab and rib channel waveguides. For slab waveguides the attenuation of 0.15 dB/cm was obtained, and for the produced single mode rib channel waveguides, the attenuation of 1.7 dB/cm was obtained.",

keywords = "Planar waveguides, Rib waveguides, Silica-titania films, Sol-gel process",

author = "P. Karasi{\'n}ski and C. Tyszkiewicz and R. Rogozi{\'n}ski and J. Jaglarz and J.mazur",

year = "2011",

month = jun,

day = "1",

doi = "10.1016/j.tsf.2011.02.064",

language = "English",

volume = "519",

pages = "5544--5551",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "16",

}

TY - JOUR

T1 - Optical rib waveguides based on sol-gel derived silica-titania films

AU - Karasiński, P.

AU - Tyszkiewicz, C.

AU - Rogoziński, R.

AU - Jaglarz, J.

AU - J.mazur,

PY - 2011/6/1

Y1 - 2011/6/1

N2 - Rib channel waveguides were produced with the application of chemical wet etching of the sol-gel derived silica-titania (SiO2-TiO2) waveguide films. The silica-titania films were etched in water solutions of ammonia fluoride. In the etching process, the waveguide films were selectively masked with a photoresist. This paper presents the theoretical analysis of rib channel waveguides as well as the results of experimental research on slab and rib channel waveguides. For slab waveguides the attenuation of 0.15 dB/cm was obtained, and for the produced single mode rib channel waveguides, the attenuation of 1.7 dB/cm was obtained.

AB - Rib channel waveguides were produced with the application of chemical wet etching of the sol-gel derived silica-titania (SiO2-TiO2) waveguide films. The silica-titania films were etched in water solutions of ammonia fluoride. In the etching process, the waveguide films were selectively masked with a photoresist. This paper presents the theoretical analysis of rib channel waveguides as well as the results of experimental research on slab and rib channel waveguides. For slab waveguides the attenuation of 0.15 dB/cm was obtained, and for the produced single mode rib channel waveguides, the attenuation of 1.7 dB/cm was obtained.

KW - Planar waveguides

KW - Rib waveguides

KW - Silica-titania films

KW - Sol-gel process

UR - https://www.scopus.com/pages/publications/79957987404

U2 - 10.1016/j.tsf.2011.02.064

DO - 10.1016/j.tsf.2011.02.064

M3 - Article

AN - SCOPUS:79957987404

SN - 0040-6090

VL - 519

SP - 5544

EP - 5551

JO - Thin Solid Films

JF - Thin Solid Films

IS - 16

ER -

Optical rib waveguides based on sol-gel derived silica-titania films

Abstrakt

Obszary tematyczne ASJC Scopus

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