Multiobjective evolutionary optimization of MEMS structures

The paper is devoted to the shape optimization of piezoelectric and electro-thermo-mechanical devices by the use of multiobjective evolutionary algorithm. In this paper, special implementation of multiobjective evolutionary algorithm is applied (MOOPTIM). Several test problems are solved in order to test efficiency of the algorithm. The results are compared with the Non-Dominated Sorting Genetic Algorithm (NSGA-II). The objective function values are calculated for each chromosome in every generation by solving a boundary value problem for the piezoelectricity and electro-thermal-mechanical analysis. In order to solve the boundary value problems, the finite element method is used. Different functionals based on the results derived from coupled field analyses are formulated. The aim of the multiobjective problem is to determine the specific dimensions of the optimized structures. Numerical examples for multiobjective shape optimization are enclosed.