Dielectric layers SiO 2: TiO 2 produced using the sol-gel technology for the application in planar sensors

Paweł Karasiński

doi:10.1117/12.581741

Dielectric layers SiO ₂: TiO ₂ produced using the sol-gel technology for the application in planar sensors

Paweł Karasiński

Katedra Optoelektroniki (RE/RE4)

Wyniki badań: Wkład do czasopisma › Artykuł z konferencji › recenzja

4 Cytowania z bazy Scopus

Abstrakt

The paper presents the results of investigations involving the influence of drying time and annealing temperature on refractive index and thickness of two-component dielectric layers SiO ₂:TiO ₂ produced with the application of sol-gel technology. The production technology and the method for the determination of parameters of the produced layers has been discussed. The results of theoretical analysis of planar refractometer has been presented in the system of difference interferometer produced with the application of the elaborated planar waveguides.

Język oryginału	angielski
Numer artykułu	31
Strony (od–do)	176-180
Liczba stron	5
Czasopismo	Proceedings of SPIE - The International Society for Optical Engineering
Tom	5576
Identyfikatory DOI	https://doi.org/10.1117/12.581741
Status publikacji	Opublikowano - 2004
Wydarzenie	Lightguides and their Applications II, TAL 2003 - Krasnobrod, Polska Czas trwania: 9 paź 2003 → 11 paź 2003

Obszary tematyczne ASJC Scopus

Materiały elektroniczne, optyczne i magnetyczne
Fizyka materii skondensowanej
Zastosowania informatyki
Matematyka stosowana
Inżynieria elektryczna i elektroniczna

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10.1117/12.581741

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@article{7b3992ee47bd43fdb13576e9f9938e92,

title = "Dielectric layers SiO 2: TiO 2 produced using the sol-gel technology for the application in planar sensors",

abstract = "The paper presents the results of investigations involving the influence of drying time and annealing temperature on refractive index and thickness of two-component dielectric layers SiO 2:TiO 2 produced with the application of sol-gel technology. The production technology and the method for the determination of parameters of the produced layers has been discussed. The results of theoretical analysis of planar refractometer has been presented in the system of difference interferometer produced with the application of the elaborated planar waveguides.",

keywords = "Planar sensor, Planar waveguide, Sol-gel",

author = "Pawe{\l} Karasi{\'n}ski",

year = "2004",

doi = "10.1117/12.581741",

language = "English",

volume = "5576",

pages = "176--180",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Lightguides and their Applications II, TAL 2003 ; Conference date: 09-10-2003 Through 11-10-2003",

}

TY - JOUR

T1 - Dielectric layers SiO 2

T2 - Lightguides and their Applications II, TAL 2003

AU - Karasiński, Paweł

PY - 2004

Y1 - 2004

N2 - The paper presents the results of investigations involving the influence of drying time and annealing temperature on refractive index and thickness of two-component dielectric layers SiO 2:TiO 2 produced with the application of sol-gel technology. The production technology and the method for the determination of parameters of the produced layers has been discussed. The results of theoretical analysis of planar refractometer has been presented in the system of difference interferometer produced with the application of the elaborated planar waveguides.

AB - The paper presents the results of investigations involving the influence of drying time and annealing temperature on refractive index and thickness of two-component dielectric layers SiO 2:TiO 2 produced with the application of sol-gel technology. The production technology and the method for the determination of parameters of the produced layers has been discussed. The results of theoretical analysis of planar refractometer has been presented in the system of difference interferometer produced with the application of the elaborated planar waveguides.

KW - Planar sensor

KW - Planar waveguide

KW - Sol-gel

UR - https://www.scopus.com/pages/publications/17644403103

U2 - 10.1117/12.581741

DO - 10.1117/12.581741

M3 - Conference article

AN - SCOPUS:17644403103

SN - 0277-786X

VL - 5576

SP - 176

EP - 180

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 31

Y2 - 9 October 2003 through 11 October 2003

ER -