Badania odpowiedzi sensorowej cienkich warstw oraz nanostruktur SnO2

Krzysztof Waczyński; Weronika Izydorczyk; Natalia Niemiec; Jerzy Uljanow; Wiesław Domański; Janusz Mazurkiewicz

doi:10.15199/48.2015.09.52

Badania odpowiedzi sensorowej cienkich warstw oraz nanostruktur SnO₂

Krzysztof Waczyński
, Weronika Izydorczyk
, Natalia Niemiec
, Jerzy Uljanow
, Wiesław Domański
, Janusz Mazurkiewicz

Silesian University of Technology
Instytut Materiałów Inzynierskich i Biomedycznych

Wyniki badań: Wkład do czasopisma › Artykuł › recenzja

1 Cytowanie z bazy Scopus

Abstrakt

The results of research on resistance sensor SnO₂ structures response to gas was presented in this work. Gas sensitive layer was fabricated using two technologies: RGTO and nano wire growth by thermal vapor deposition. Classic test sensor structure was subjected to two gases: nitrogen dioxide NO₂, in concentration of 3 ppm, 8 ppm, 25 ppm, 80 ppm and 240 ppm, and hydrogen H₂, in concentration of 1500 ppm, 4000 ppm, 10000 ppm, 20000 ppm and 40000 ppm, registering the response of sensor layer in temperature of 250 °C and 300 °C.

Przetłumaczony tytuł wkładu	Studies on sensor response of SnO₂thin films and 1-D nanostructures
Język oryginału	polski
Strony (od–do)	199-203
Liczba stron	5
Czasopismo	Przeglad Elektrotechniczny
Tom	91
Numer wydania	9
Identyfikatory DOI	https://doi.org/10.15199/48.2015.09.52
Status publikacji	Opublikowano - 1 sie 2015

Słowa kluczowe

RGTO technology
Resistive gas sensors
Sensors
SnO nanostructures
Thermal vapor deposition
Thin films

Obszary tematyczne ASJC Scopus

Inżynieria elektryczna i elektroniczna

Uzyskaj dostęp do dokumentu

10.15199/48.2015.09.52

Inne pliki i linki

Link do publikacji w Scopus

Cytowanie

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AU - Niemiec, Natalia

AU - Uljanow, Jerzy

AU - Domański, Wiesław

AU - Mazurkiewicz, Janusz

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KW - RGTO technology

KW - Resistive gas sensors

KW - Sensors

KW - SnO nanostructures

KW - Thermal vapor deposition

KW - Thin films

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