Application of the unipole mass filter for determination of the partial pressure of gases with near atomic mass number

A. Król; J. Szuber; S. Kaszczyszyn

doi:10.1016/S0042-207X(98)00461-8

Application of the unipole mass filter for determination of the partial pressure of gases with near atomic mass number

A. Król
, J. Szuber
, S. Kaszczyszyn

University of Wrocław

Wyniki badań: Wkład do czasopisma › Artykuł z konferencji › recenzja

2 Cytowania z bazy Scopus

Abstrakt

In this paper a self-constructed unipolar mass filter is presented together with a new method to determine the partial pressures of gases with near atomic mass number desorbing from the surfaces during surface chemical reactions. It mainly uses the dependence of the efficiency of gas ionisation on the ionisation energy of electrons. Using the proposed procedure, the relative contents of methane and atomic oxygen observed during the cleaning of native oxide covered GaAs(100) surface by atomic hydrogen were estimated as 0.1 ± 0.02.

Język oryginału	angielski
Strony (od–do)	205-209
Liczba stron	5
Czasopismo	Vacuum
Tom	54
Numer wydania	1-4
Identyfikatory DOI	https://doi.org/10.1016/S0042-207X(98)00461-8
Status publikacji	Opublikowano - lip 1999
Wydarzenie	Proceedings of the 1998 19th International Seminar on Surface Physics - Polanica-Zdroj, Pol Czas trwania: 15 cze 1998 → 19 cze 1998

Obszary tematyczne ASJC Scopus

Instrumentacja
Fizyka materii skondensowanej
Powierzchnie, powłoki i filmy

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10.1016/S0042-207X(98)00461-8

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abstract = "In this paper a self-constructed unipolar mass filter is presented together with a new method to determine the partial pressures of gases with near atomic mass number desorbing from the surfaces during surface chemical reactions. It mainly uses the dependence of the efficiency of gas ionisation on the ionisation energy of electrons. Using the proposed procedure, the relative contents of methane and atomic oxygen observed during the cleaning of native oxide covered GaAs(100) surface by atomic hydrogen were estimated as 0.1 ± 0.02.",

author = "A. Kr{\'o}l and J. Szuber and S. Kaszczyszyn",

year = "1999",

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AU - Król, A.

AU - Szuber, J.

AU - Kaszczyszyn, S.

PY - 1999/7

Y1 - 1999/7

N2 - In this paper a self-constructed unipolar mass filter is presented together with a new method to determine the partial pressures of gases with near atomic mass number desorbing from the surfaces during surface chemical reactions. It mainly uses the dependence of the efficiency of gas ionisation on the ionisation energy of electrons. Using the proposed procedure, the relative contents of methane and atomic oxygen observed during the cleaning of native oxide covered GaAs(100) surface by atomic hydrogen were estimated as 0.1 ± 0.02.

AB - In this paper a self-constructed unipolar mass filter is presented together with a new method to determine the partial pressures of gases with near atomic mass number desorbing from the surfaces during surface chemical reactions. It mainly uses the dependence of the efficiency of gas ionisation on the ionisation energy of electrons. Using the proposed procedure, the relative contents of methane and atomic oxygen observed during the cleaning of native oxide covered GaAs(100) surface by atomic hydrogen were estimated as 0.1 ± 0.02.

UR - https://www.scopus.com/pages/publications/0342784246

U2 - 10.1016/S0042-207X(98)00461-8

DO - 10.1016/S0042-207X(98)00461-8

M3 - Conference article

AN - SCOPUS:0342784246

SN - 0042-207X

VL - 54

SP - 205

EP - 209

JO - Vacuum

JF - Vacuum

IS - 1-4

T2 - Proceedings of the 1998 19th International Seminar on Surface Physics

Y2 - 15 June 1998 through 19 June 1998

ER -

Application of the unipole mass filter for determination of the partial pressure of gases with near atomic mass number

Abstrakt

Obszary tematyczne ASJC Scopus

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