The use of laser printers for obtaining photomasks for the photolithography process

Kazimierz Gut; Sebastian Student

doi:10.1117/12.2539416

The use of laser printers for obtaining photomasks for the photolithography process

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.

Original language	English
Title of host publication	14th Conference on Integrated Optics
Subtitle of host publication	Sensors, Sensing Structures, and Methods
Editors	Przemyslaw Struk, Tadeusz Pustelny
Publisher	SPIE
ISBN (Electronic)	9781510631502
DOIs	https://doi.org/10.1117/12.2539416
Publication status	Published - 2019
Event	14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019 - Szcyzyrk, Poland Duration: 25 Feb 2019 → 1 Mar 2019

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11204
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019
Country/Territory	Poland
City	Szcyzyrk
Period	25/02/19 → 1/03/19

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Low-cos microfabrication
MEMS
SU-8
UV photolithography

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2539416

Cite this

Gut, K., & Student, S. (2019). The use of laser printers for obtaining photomasks for the photolithography process. In P. Struk, & T. Pustelny (Eds.), 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods Article 112040J (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11204). SPIE. https://doi.org/10.1117/12.2539416

@inproceedings{517764ec57bf40c1b96eee9c24522324,

title = "The use of laser printers for obtaining photomasks for the photolithography process",

abstract = "For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.",

keywords = "Low-cos microfabrication, MEMS, SU-8, UV photolithography",

author = "Kazimierz Gut and Sebastian Student",

note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019 ; Conference date: 25-02-2019 Through 01-03-2019",

year = "2019",

doi = "10.1117/12.2539416",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Przemyslaw Struk and Tadeusz Pustelny",

booktitle = "14th Conference on Integrated Optics",

address = "United States",

}

Gut, K & Student, S 2019, The use of laser printers for obtaining photomasks for the photolithography process. in P Struk & T Pustelny (eds), 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods., 112040J, Proceedings of SPIE - The International Society for Optical Engineering, vol. 11204, SPIE, 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019, Szcyzyrk, Poland, 25/02/19. https://doi.org/10.1117/12.2539416

The use of laser printers for obtaining photomasks for the photolithography process. / Gut, Kazimierz ; Student, Sebastian.
14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods. ed. / Przemyslaw Struk; Tadeusz Pustelny. SPIE, 2019. 112040J (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 11204).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - The use of laser printers for obtaining photomasks for the photolithography process

AU - Gut, Kazimierz

AU - Student, Sebastian

PY - 2019

Y1 - 2019

N2 - For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.

AB - For several decades, microfluidics and related fields have been dynamically developing. For the implementation of structures with a size of several dozen micrometers instead of expensive chrome photomasks, in some cases patterns printed on a typical film by laser printers can be used. The work will compare chrome masks and masks made by laser printers. The structures obtained by the less expensive masks printed on the film will also be presented.

KW - Low-cos microfabrication

KW - MEMS

KW - SU-8

KW - UV photolithography

UR - https://www.scopus.com/pages/publications/85073693344

U2 - 10.1117/12.2539416

DO - 10.1117/12.2539416

M3 - Conference contribution

AN - SCOPUS:85073693344

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - 14th Conference on Integrated Optics

A2 - Struk, Przemyslaw

A2 - Pustelny, Tadeusz

PB - SPIE

T2 - 14th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2019

Y2 - 25 February 2019 through 1 March 2019

ER -

The use of laser printers for obtaining photomasks for the photolithography process

Abstract

Publication series

Conference

UN SDGs

Keywords

ASJC Scopus subject areas

Access to Document

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