Abstract
In this paper, we present the construction and preliminary experimental results of a MOEMS fiber-based integrated probe for endoscopic optical imaging of stomach tissue using a Swept-Source Optical Coherence Tomography (SSOCT). The probe consists of a Mirau micro-interferometer, combined with a GRIN lens collimator and a micromirror scanner. We describe the building blocks of the probe, especially the monolithically integrated Mirau mirointerferometer, fabricated by wafer-level vertical stacking and anodic bonding of Si/glass components, and the electrothermal 2-axis MEMS microscanner allowing large swept angles (up to ±22°) at high frequencies (> kHz) for low driving voltages (<20 V). The results of probe characterization, performed in a designed SS-OCT system, have confirmed proper operation of the probe. The B-scan images were obtained for central wavelength of λc = 840 nm, swept range of Dλ = 60 nm and A-scan frequency of fA= 110 kHz. The axial resolution of the probe is equal to 5.2 μm (determined by applied swept source), whereas the lateral resolution, measured by use of USAF test pattern, is 9.8 μm.
| Original language | English |
|---|---|
| Title of host publication | Optical Micro- and Nanometrology VII |
| Editors | Anand Krishna Asundi, Wolfgang Osten, Christophe Gorecki |
| Publisher | SPIE |
| ISBN (Electronic) | 9781510618824 |
| DOIs | |
| Publication status | Published - 2018 |
| Event | Optical Micro- and Nanometrology VII 2018 - Strasbourg, France Duration: 25 Apr 2018 → 26 Apr 2018 |
Publication series
| Name | Proceedings of SPIE - The International Society for Optical Engineering |
|---|---|
| Volume | 10678 |
| ISSN (Print) | 0277-786X |
| ISSN (Electronic) | 1996-756X |
Conference
| Conference | Optical Micro- and Nanometrology VII 2018 |
|---|---|
| Country/Territory | France |
| City | Strasbourg |
| Period | 25/04/18 → 26/04/18 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 3 Good Health and Well-being
Keywords
- MOEMS Mirau micro-interferometer
- Optical imaging
- SS-OCT endomicroscopy probe
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
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