Structure of the nanocrystalline coatings obtained on the CAE process on the sintered tool materials

Within the project framework the structure was investigated of the TiN + (Ti,Al,Si)N+TiN and TiN + multi(Ti,Al,Si)N + TiN type coatings deposited in the cathode arc evaporation process (CAE) onto the substrate from the cemented carbides and tool cermets, using the scanning electron microscope (SEM), transmission electron microscope (TEM), and light microscopy. Examinations of the phase composition of the coatings applied onto the substrate from cemented carbides and cermets were carried out on the X-ray diffractometer as well as their chemical composition analysis as a function of the distance from the specimen surface, the so called profile analysis; moreover, changes were investigated of concentration in the interface between the coating and the substrate material, based on the examinations in the glow discharge optical emission spectroscope.