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Spray-on glass solution for fabrication silicon solar cell emitter layer

  • Polish Academy of Sciences

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

Purpose - The main aim of this study was a preparation development of dopant solution (DS) which can be deposited by a spray-on method and subsequently allows obtaining the no emitter layer with surface resistance in the range of 65-80 ω1. The intention of chosen spray-on method was to gain a cheaper way of dopant source deposition, compared to the commonly used methods, which is of particular importance for the new low-cost production processes. Design/methodology/approach - This paper presents the sequence in producing a spray-on glass solution (DS) with very high concentration of phosphorus, which allows to perform diffusion doping at relatively low temperatures. DS contained deionized water, ethyl alcohol, tetraethoxysilane and othophosphoric acid. Findings - The sequence in producing a DS was performed with respect to enabling the application to silicon wafers by spray-on method. Furthermore, the equations defined density and viscosity of DS in term of storage time were referred to determine the possibility of applying this solution by spray-on method. Besides, the dependence of the emitter surface resistance on the doping (diffusion) time was determined. Accordingly, optimal process conditions were specified. Originality/value - The paper presents a new, so far unpublished composition of DS with very high concentration of phosphorus, which can be applied using a spray-on method. Moreover, original are also investigations respecting some properties of obtained DS relative to storage time.

Original languageEnglish
Pages (from-to)149-153
Number of pages5
JournalMicroelectronics International
Volume34
Issue number3
DOIs
Publication statusPublished - 2017

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 7 - Affordable and Clean Energy
    SDG 7 Affordable and Clean Energy

Keywords

  • Dopant solution
  • Emitter layer
  • Silicon solar cell
  • Spray-on glass solution

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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