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Sol-gel derived SiO 2:TiO 2 films for applications in optoelectronics

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The paper presents silica films of the refractive index 1.267-1.420 and silica-titania films of high refractive index 1.762. Basic fabrication technology was presented as well as the applied measurement methods of refractive index and thickness. The paper provides examples for the application of the elaborated technology for the fabrication of waveguide films, inputoutput grating couplers and channel RIB waveguides.

Original languageEnglish
Title of host publicationLightguides and Their Applications III
DOIs
Publication statusPublished - 2007
EventLightguides and Their Applications III - 10th Conference on Technology and Application of Lightguides, TAL 2006 - Krasnobrod, Poland
Duration: 4 Oct 20067 Oct 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6608
ISSN (Print)0277-786X

Conference

ConferenceLightguides and Their Applications III - 10th Conference on Technology and Application of Lightguides, TAL 2006
Country/TerritoryPoland
CityKrasnobrod
Period4/10/067/10/06

Keywords

  • Planar waveguide
  • Silica film
  • Silica-titania film
  • Sol-gel

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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