Single-mode Rib waveguides fabricated by means of sol-gel method

P. Karasiński; C. Tyszkiewicz; R. Rogoziński

doi:10.12693/APhysPolA.118.1168

Single-mode Rib waveguides fabricated by means of sol-gel method

Department of Optoelectronics (RE/RE4)

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO₂:TiO₂ which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO₂:TiO₂ was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.

Original language	English
Pages (from-to)	1168-1170
Number of pages	3
Journal	Acta Physica Polonica A
Volume	118
Issue number	6
DOIs	https://doi.org/10.12693/APhysPolA.118.1168
Publication status	Published - 1 Dec 2010

ASJC Scopus subject areas

General Physics and Astronomy

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10.12693/APhysPolA.118.1168

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title = "Single-mode Rib waveguides fabricated by means of sol-gel method",

abstract = "Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.",

author = "P. Karasi{\'n}ski and C. Tyszkiewicz and R. Rogozi{\'n}ski",

year = "2010",

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AU - Karasiński, P.

AU - Tyszkiewicz, C.

AU - Rogoziński, R.

PY - 2010/12/1

Y1 - 2010/12/1

N2 - Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.

AB - Rib waveguides were fabricated with the use of selective, wet chemical etching of two-component waveguide films SiO2:TiO2 which were obtained using sol-gel method. Photoresist was applied as a mask in the process. The etching of the films SiO2:TiO2 was carried out in water solution of ammonia fluoride. The paper presents the results of theoretical analysis as well as the power distributions in the fabricated strip waveguides.

UR - https://www.scopus.com/pages/publications/78650491438

U2 - 10.12693/APhysPolA.118.1168

DO - 10.12693/APhysPolA.118.1168

M3 - Article

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JO - Acta Physica Polonica A

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Single-mode Rib waveguides fabricated by means of sol-gel method

Abstract

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