@inbook{b1397aa6fcc04ff19b84c3b2ed5b07b0,
title = "Scanning thermal microscopy{\textemdash}a tool for thermal measurement in the nanoscale",
abstract = "This chapter provides fundamentals of scanning thermal microscopy (SThM), a scanning probe microscopy allowing thermal measurement with nanometer spatial resolution. It starts with a few examples of an importance of understanding of thermal transport phenomena for nowadays technology and need in methods for thermal measurement in nanoscale. Then the development and current state of the art of SThM is described. Detailed characterization of experimental equipment, operating modes, and thermal probes used in measurements is given. For completeness, some basics of theoretical model of the method are also presented. Based on this model, potentialities and limitations of SThM thermal measurements are analyzed. The last part of the chapter is devoted to methods of quantitative measurements utilizing SThM equipment, i.e., nanoscale absolute thermometry, and measurements of local thermal conductivity. In final remarks, spectacular achievements and possible ways of further development are discussed.",
keywords = "Nanoscale thermal measurement, SPM, SThM, Scanning probe microscopy, Scanning thermal microscopy, Thermal transport at nanoscale",
author = "Jerzy Bodzenta",
note = "Publisher Copyright: {\textcopyright} 2019 Maria Benelmekki and Andreas Erbe",
year = "2019",
doi = "10.1016/B978-0-08-102572-7.00007-6",
language = "English",
series = "Frontiers of Nanoscience",
publisher = "Elsevier Ltd.",
pages = "181--213",
booktitle = "Frontiers of Nanoscience",
address = "United Kingdom",
}