Response to oxygen and chemical properties of SnO2 thin-film gas sensors

Bogusława Adamowicz; Weronika Izydorczyk; Jacek Izydorczyk; Andrzej Klimasek; Wiesław Jakubik; Janusz Zywicki

doi:10.1016/j.vacuum.2008.01.003

Response to oxygen and chemical properties of SnO₂ thin-film gas sensors

Department of Telecommunications and Teleinformatics (RAU/RAU13)

Institute of Physics
High-Tech International Services

Research output: Contribution to journal › Article › peer-review

30 Citations (Scopus)

Abstract

The measurements of the response-in terms of the conductance changes-to oxygen adsorption of tin dioxide (SnO₂) thin-film-based gas sensors were performed. The sensing SnO₂ layers were obtained by means of the rheotaxial growth and thermal oxidation (RGTO) method. The sensor responses were measured under a dry gas flow containing oxygen in nitrogen, within the range of temperature from 25 to 540 °C. For comparison, similar studies were performed for a commercial SnO₂ thick-film (TGS 812) gas sensor. The in-depth profiles of the chemical composition of the RGTO SnO₂ layers were determined from the scanning Auger microprobe experiment. The changes in concentration ratios [O]/[Sn] and [C]/[Sn] from the near-surface region towards the grain bulk were shown.

Original language	English
Pages (from-to)	966-970
Number of pages	5
Journal	Vacuum
Volume	82
Issue number	10
DOIs	https://doi.org/10.1016/j.vacuum.2008.01.003
Publication status	Published - 3 Jun 2008

Keywords

Auger electron spectroscopy
Oxygen adsorption
RGTO technique
Solid-state gas sensors
Surface electronic properties
Tin dioxide

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

Access to Document

10.1016/j.vacuum.2008.01.003

Cite this

@article{42aa33c3c09f47638500299ca01c2805,

title = "Response to oxygen and chemical properties of SnO2 thin-film gas sensors",

abstract = "The measurements of the response-in terms of the conductance changes-to oxygen adsorption of tin dioxide (SnO2) thin-film-based gas sensors were performed. The sensing SnO2 layers were obtained by means of the rheotaxial growth and thermal oxidation (RGTO) method. The sensor responses were measured under a dry gas flow containing oxygen in nitrogen, within the range of temperature from 25 to 540 °C. For comparison, similar studies were performed for a commercial SnO2 thick-film (TGS 812) gas sensor. The in-depth profiles of the chemical composition of the RGTO SnO2 layers were determined from the scanning Auger microprobe experiment. The changes in concentration ratios [O]/[Sn] and [C]/[Sn] from the near-surface region towards the grain bulk were shown.",

keywords = "Auger electron spectroscopy, Oxygen adsorption, RGTO technique, Solid-state gas sensors, Surface electronic properties, Tin dioxide",

author = "Bogus{\l}awa Adamowicz and Weronika Izydorczyk and Jacek Izydorczyk and Andrzej Klimasek and Wies{\l}aw Jakubik and Janusz Zywicki",

year = "2008",

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doi = "10.1016/j.vacuum.2008.01.003",

language = "English",

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T1 - Response to oxygen and chemical properties of SnO2 thin-film gas sensors

AU - Adamowicz, Bogusława

AU - Izydorczyk, Weronika

AU - Izydorczyk, Jacek

AU - Klimasek, Andrzej

AU - Jakubik, Wiesław

AU - Zywicki, Janusz

PY - 2008/6/3

Y1 - 2008/6/3

N2 - The measurements of the response-in terms of the conductance changes-to oxygen adsorption of tin dioxide (SnO2) thin-film-based gas sensors were performed. The sensing SnO2 layers were obtained by means of the rheotaxial growth and thermal oxidation (RGTO) method. The sensor responses were measured under a dry gas flow containing oxygen in nitrogen, within the range of temperature from 25 to 540 °C. For comparison, similar studies were performed for a commercial SnO2 thick-film (TGS 812) gas sensor. The in-depth profiles of the chemical composition of the RGTO SnO2 layers were determined from the scanning Auger microprobe experiment. The changes in concentration ratios [O]/[Sn] and [C]/[Sn] from the near-surface region towards the grain bulk were shown.

AB - The measurements of the response-in terms of the conductance changes-to oxygen adsorption of tin dioxide (SnO2) thin-film-based gas sensors were performed. The sensing SnO2 layers were obtained by means of the rheotaxial growth and thermal oxidation (RGTO) method. The sensor responses were measured under a dry gas flow containing oxygen in nitrogen, within the range of temperature from 25 to 540 °C. For comparison, similar studies were performed for a commercial SnO2 thick-film (TGS 812) gas sensor. The in-depth profiles of the chemical composition of the RGTO SnO2 layers were determined from the scanning Auger microprobe experiment. The changes in concentration ratios [O]/[Sn] and [C]/[Sn] from the near-surface region towards the grain bulk were shown.

KW - Auger electron spectroscopy

KW - Oxygen adsorption

KW - RGTO technique

KW - Solid-state gas sensors

KW - Surface electronic properties

KW - Tin dioxide

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DO - 10.1016/j.vacuum.2008.01.003

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SP - 966

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JO - Vacuum

JF - Vacuum

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