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Planar optical waveguides for application in optoelectronic gas sensors

  • K. Golaszewska
  • , E. Kamińska
  • , T. Pustelny
  • , P. Struk
  • , T. Piotrowski
  • , A. Piotrowska
  • , M. Ekielski
  • , R. Kruszka
  • , M. Wzorek
  • , M. Borysiewicz
  • , I. Pasternak
  • , K. Gut
  • Institute of Microelectronics and Photonics
  • Silesian University of Technology

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

In the paper, the results of technological investigations on planar optical waveguides based on high band gap oxide semiconductors were presented. Investigations concerned the technologies of depositing very thin layers of: zinc oxide ZnO, titanium dioxide TiO2 and tin dioxide SnO2 on substrates of quartz glass plates. There were investigated both morphological structures of the produced layers and their optical properties. The paper also presents investigations on the technology of input-output light systems in the Bragg grating structures.

Original languageEnglish
Pages (from-to)A223-A230
JournalActa Physica Polonica A
Volume114
Issue number6 A
DOIs
Publication statusPublished - Dec 2008

ASJC Scopus subject areas

  • General Physics and Astronomy

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