Optical rib waveguides based on sol-gel derived silica-titania films

P. Karasiński; C. Tyszkiewicz; R. Rogoziński; J. Jaglarz; J.mazur

doi:10.1016/j.tsf.2011.02.064

Optical rib waveguides based on sol-gel derived silica-titania films

P. Karasiński
, C. Tyszkiewicz
, R. Rogoziński
, J. Jaglarz
, J.mazur

Department of Optoelectronics (RE/RE4)

Cracow University of Technology
Silesian University of Technology

Research output: Contribution to journal › Article › peer-review

54 Citations (Scopus)

Abstract

Rib channel waveguides were produced with the application of chemical wet etching of the sol-gel derived silica-titania (SiO₂-TiO₂) waveguide films. The silica-titania films were etched in water solutions of ammonia fluoride. In the etching process, the waveguide films were selectively masked with a photoresist. This paper presents the theoretical analysis of rib channel waveguides as well as the results of experimental research on slab and rib channel waveguides. For slab waveguides the attenuation of 0.15 dB/cm was obtained, and for the produced single mode rib channel waveguides, the attenuation of 1.7 dB/cm was obtained.

Original language	English
Pages (from-to)	5544-5551
Number of pages	8
Journal	Thin Solid Films
Volume	519
Issue number	16
DOIs	https://doi.org/10.1016/j.tsf.2011.02.064
Publication status	Published - 1 Jun 2011

Keywords

Planar waveguides
Rib waveguides
Silica-titania films
Sol-gel process

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2011.02.064

Cite this

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title = "Optical rib waveguides based on sol-gel derived silica-titania films",

abstract = "Rib channel waveguides were produced with the application of chemical wet etching of the sol-gel derived silica-titania (SiO2-TiO2) waveguide films. The silica-titania films were etched in water solutions of ammonia fluoride. In the etching process, the waveguide films were selectively masked with a photoresist. This paper presents the theoretical analysis of rib channel waveguides as well as the results of experimental research on slab and rib channel waveguides. For slab waveguides the attenuation of 0.15 dB/cm was obtained, and for the produced single mode rib channel waveguides, the attenuation of 1.7 dB/cm was obtained.",

keywords = "Planar waveguides, Rib waveguides, Silica-titania films, Sol-gel process",

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AU - Karasiński, P.

AU - Tyszkiewicz, C.

AU - Rogoziński, R.

AU - Jaglarz, J.

AU - J.mazur,

PY - 2011/6/1

Y1 - 2011/6/1

N2 - Rib channel waveguides were produced with the application of chemical wet etching of the sol-gel derived silica-titania (SiO2-TiO2) waveguide films. The silica-titania films were etched in water solutions of ammonia fluoride. In the etching process, the waveguide films were selectively masked with a photoresist. This paper presents the theoretical analysis of rib channel waveguides as well as the results of experimental research on slab and rib channel waveguides. For slab waveguides the attenuation of 0.15 dB/cm was obtained, and for the produced single mode rib channel waveguides, the attenuation of 1.7 dB/cm was obtained.

AB - Rib channel waveguides were produced with the application of chemical wet etching of the sol-gel derived silica-titania (SiO2-TiO2) waveguide films. The silica-titania films were etched in water solutions of ammonia fluoride. In the etching process, the waveguide films were selectively masked with a photoresist. This paper presents the theoretical analysis of rib channel waveguides as well as the results of experimental research on slab and rib channel waveguides. For slab waveguides the attenuation of 0.15 dB/cm was obtained, and for the produced single mode rib channel waveguides, the attenuation of 1.7 dB/cm was obtained.

KW - Planar waveguides

KW - Rib waveguides

KW - Silica-titania films

KW - Sol-gel process

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DO - 10.1016/j.tsf.2011.02.064

M3 - Article

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SN - 0040-6090

VL - 519

SP - 5544

EP - 5551

JO - Thin Solid Films

JF - Thin Solid Films

IS - 16

ER -

Optical rib waveguides based on sol-gel derived silica-titania films

Abstract

Keywords

ASJC Scopus subject areas

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