Abstract
Thin film of hydrogenated amorphous silicon (a-Si:H) were annealed using CO2 laser radiation (λ=10, 6 μm). The influence of this laser treatment on spectral dependencies of real part of refractive index and absorption coefficient of light in a-Si:H are presented. The values of energy gap have decreased while the Urbach energy increased after CO2 laser annealing of a-Si:H. The conductivity and photoconductivity of the annealed material have decreased. The power coefficient of the light intensity dependence of photoconductivity has also changed. The influence of CO2 laser irradiation on the energetic distribution of electron states of a-Si:H is reported.
| Original language | English |
|---|---|
| Pages (from-to) | 174-179 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4238 |
| DOIs | |
| Publication status | Published - 2000 |
| Event | Laser Technology VI: Applications - Szczecin-Swinoujscie, Pol Duration: 27 Sept 2000 → 1 Oct 2000 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
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