Microscopic study of the structure of the SnO₂ thin films obtained by the RGTO technique

The results on the use of technology of rheotaxial growth and thermal oxidation to prepare sensory layers of stannic oxide (SnO₂) are presented in this study. Sensory properties of the SnO₂ layers greatly depend on a stage of tin layer rheotaxial growth. Observations of tin layer surface made after the process of rheotaxial growth and of the SnO₂ surface on the oxidation stage performed by méans of a scanning electron microscope permitted drawing of many substantial conclusions regarding technology of production. The worked out technology made it possible to form sensors structures, which were next measured. This study provides a fragment of a wide research project over preparation and characterization of thin sensory layers made from stannic oxide and accomplished at the Institute of Physics and Institute of Electronics, Silesian Technical University.