@inproceedings{97aa5febec974d53a218bd5ce4297d32,
title = "Investigation of physical properties of ZnO semiconductor material for biocompatible coating layer applications",
abstract = "The paper presents investigation of physical properties of ZnO semiconductor for biomedical applications as a coating layer for example in medical devices and structures. The research was focused on determination of surface topography by SEM method, surface roughness by AFM method, chemical composition by EDS method and crystalline structure of ZnO by Raman spectroscopy. The investigated ZnO coating was deposited by reactive magnetron sputtering on quartz substrate.",
keywords = "ZnO semiconductor, biocompatible coating",
author = "Przemyslaw Struk and Borysiewicz, \{Michal A.\}",
note = "Publisher Copyright: {\textcopyright} 2018 SPIE.; 13th Conference on Integrated Optics: Sensors, Sensing Structures, and Methods, IOS 2018 ; Conference date: 26-02-2018 Through 02-03-2018",
year = "2018",
doi = "10.1117/12.2503228",
language = "English",
isbn = "9781510622722",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Przemyslaw Struk and Tadeusz Pustelny and Przemyslaw Struk",
booktitle = "13th Conference on Integrated Optics",
address = "United States",
}