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Influence of solution acidity on composition, structure and electrical parameters of Ni-P alloys

  • Silesian University of Technology
  • Institute of Microelectronics and Photonics

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

Purpose - The purpose of this paper is to characterize electrical parameters of amorphous Ni-P resistive layers used for fabrication of precise resistors. Design/methodology/approach - Ni-P resistive layers were produced by the chemical process in water solution using Ni2+and H 2PO2- ions. The paper presents the results of the studies concerning the influence of bath acidity and conditions of thermal stabilization on the structure and temperature coefficient of resistance of Ni-P alloy. Findings - The temperature coefficient of resistance of amorphous Ni-P layers was found to depend significantly on the parameters of chemical metallisation process. It was stated that the changes of through-casing resistivity versus the acidity of technological solution have roughly parabolic characteristics. Originality/value - In this paper, it was at first explained how the changes of the structure of Ni-P resistive layers depend on their temperature coefficient of capacitance. Alloys Electrical resistivity Metallizing Resistors Thin film ©

Original languageEnglish
Pages (from-to)24-27
Number of pages4
JournalMicroelectronics International
Volume26
Issue number2
DOIs
Publication statusPublished - 8 May 2009

Keywords

  • Alloys
  • Electrical resistivity
  • Metallizing
  • Resistors.
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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