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Dielectric layers SiO 2: TiO 2 produced using the sol-gel technology for the application in planar sensors

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4 Citations (Scopus)

Abstract

The paper presents the results of investigations involving the influence of drying time and annealing temperature on refractive index and thickness of two-component dielectric layers SiO 2:TiO 2 produced with the application of sol-gel technology. The production technology and the method for the determination of parameters of the produced layers has been discussed. The results of theoretical analysis of planar refractometer has been presented in the system of difference interferometer produced with the application of the elaborated planar waveguides.

Original languageEnglish
Article number31
Pages (from-to)176-180
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5576
DOIs
Publication statusPublished - 2004
EventLightguides and their Applications II, TAL 2003 - Krasnobrod, Poland
Duration: 9 Oct 200311 Oct 2003

Keywords

  • Planar sensor
  • Planar waveguide
  • Sol-gel

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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