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Dependence of silicon surface electronic parameters on surface Fermi level position

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The surface Fermi level position ΦS′, the surface space charge QSC′, and the surface recombination velocity S for real (111) surfaces of p- and n-type Si have been studied. Therefore we have measured the surface photovoltage and photocondctivity dependences vs light intensity, photon energy and temperature from 300 to 430 K. The complementary character of S(ΦS) as well as QSC(ΦS) dependences supports the view that the surface state distribution on the real semiconductor surface is determined mainly by the surface preparation process, regardless of the type of bulk doping.

Original languageEnglish
Pages (from-to)167-170
Number of pages4
JournalVacuum
Volume45
Issue number2-3
DOIs
Publication statusPublished - 1994

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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