Badania odpowiedzi sensorowej cienkich warstw oraz nanostruktur SnO2

Krzysztof Waczyński; Weronika Izydorczyk; Natalia Niemiec; Jerzy Uljanow; Wiesław Domański; Janusz Mazurkiewicz

doi:10.15199/48.2015.09.52

Badania odpowiedzi sensorowej cienkich warstw oraz nanostruktur SnO₂

Translated title of the contribution: Studies on sensor response of SnO₂thin films and 1-D nanostructures

Krzysztof Waczyński
, Weronika Izydorczyk
, Natalia Niemiec
, Jerzy Uljanow
, Wiesław Domański
, Janusz Mazurkiewicz

Silesian University of Technology
Instytut Materiałów Inzynierskich i Biomedycznych

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The results of research on resistance sensor SnO₂ structures response to gas was presented in this work. Gas sensitive layer was fabricated using two technologies: RGTO and nano wire growth by thermal vapor deposition. Classic test sensor structure was subjected to two gases: nitrogen dioxide NO₂, in concentration of 3 ppm, 8 ppm, 25 ppm, 80 ppm and 240 ppm, and hydrogen H₂, in concentration of 1500 ppm, 4000 ppm, 10000 ppm, 20000 ppm and 40000 ppm, registering the response of sensor layer in temperature of 250 °C and 300 °C.

Translated title of the contribution	Studies on sensor response of SnO₂thin films and 1-D nanostructures
Original language	Polish
Pages (from-to)	199-203
Number of pages	5
Journal	Przeglad Elektrotechniczny
Volume	91
Issue number	9
DOIs	https://doi.org/10.15199/48.2015.09.52
Publication status	Published - 1 Aug 2015

ASJC Scopus subject areas

Electrical and Electronic Engineering

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title = "Badania odpowiedzi sensorowej cienkich warstw oraz nanostruktur SnO2 ",

abstract = "The results of research on resistance sensor SnO2 structures response to gas was presented in this work. Gas sensitive layer was fabricated using two technologies: RGTO and nano wire growth by thermal vapor deposition. Classic test sensor structure was subjected to two gases: nitrogen dioxide NO2, in concentration of 3 ppm, 8 ppm, 25 ppm, 80 ppm and 240 ppm, and hydrogen H2, in concentration of 1500 ppm, 4000 ppm, 10000 ppm, 20000 ppm and 40000 ppm, registering the response of sensor layer in temperature of 250 °C and 300 °C.",

keywords = "RGTO technology, Resistive gas sensors, Sensors, SnO nanostructures, Thermal vapor deposition, Thin films",

author = "Krzysztof Waczy{\'n}ski and Weronika Izydorczyk and Natalia Niemiec and Jerzy Uljanow and Wies{\l}aw Doma{\'n}ski and Janusz Mazurkiewicz",

year = "2015",

month = aug,

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doi = "10.15199/48.2015.09.52",

language = "polski",

volume = "91",

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AU - Waczyński, Krzysztof

AU - Izydorczyk, Weronika

AU - Niemiec, Natalia

AU - Uljanow, Jerzy

AU - Domański, Wiesław

AU - Mazurkiewicz, Janusz

PY - 2015/8/1

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N2 - The results of research on resistance sensor SnO2 structures response to gas was presented in this work. Gas sensitive layer was fabricated using two technologies: RGTO and nano wire growth by thermal vapor deposition. Classic test sensor structure was subjected to two gases: nitrogen dioxide NO2, in concentration of 3 ppm, 8 ppm, 25 ppm, 80 ppm and 240 ppm, and hydrogen H2, in concentration of 1500 ppm, 4000 ppm, 10000 ppm, 20000 ppm and 40000 ppm, registering the response of sensor layer in temperature of 250 °C and 300 °C.

AB - The results of research on resistance sensor SnO2 structures response to gas was presented in this work. Gas sensitive layer was fabricated using two technologies: RGTO and nano wire growth by thermal vapor deposition. Classic test sensor structure was subjected to two gases: nitrogen dioxide NO2, in concentration of 3 ppm, 8 ppm, 25 ppm, 80 ppm and 240 ppm, and hydrogen H2, in concentration of 1500 ppm, 4000 ppm, 10000 ppm, 20000 ppm and 40000 ppm, registering the response of sensor layer in temperature of 250 °C and 300 °C.

KW - RGTO technology

KW - Resistive gas sensors

KW - Sensors

KW - SnO nanostructures

KW - Thermal vapor deposition

KW - Thin films

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DO - 10.15199/48.2015.09.52

M3 - Artykuł

AN - SCOPUS:84940171565

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SP - 199

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JO - Przeglad Elektrotechniczny

JF - Przeglad Elektrotechniczny

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ER -

Badania odpowiedzi sensorowej cienkich warstw oraz nanostruktur SnO₂

Abstract

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