Abstract
In this paper a self-constructed unipolar mass filter is presented together with a new method to determine the partial pressures of gases with near atomic mass number desorbing from the surfaces during surface chemical reactions. It mainly uses the dependence of the efficiency of gas ionisation on the ionisation energy of electrons. Using the proposed procedure, the relative contents of methane and atomic oxygen observed during the cleaning of native oxide covered GaAs(100) surface by atomic hydrogen were estimated as 0.1 ± 0.02.
| Original language | English |
|---|---|
| Pages (from-to) | 205-209 |
| Number of pages | 5 |
| Journal | Vacuum |
| Volume | 54 |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - Jul 1999 |
| Event | Proceedings of the 1998 19th International Seminar on Surface Physics - Polanica-Zdroj, Pol Duration: 15 Jun 1998 → 19 Jun 1998 |
ASJC Scopus subject areas
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
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