Application of dielectric layers made in sol-gel technique in the technology of planar waveguide sensors

P. Karasiński

doi:10.1117/12.435923

Application of dielectric layers made in sol-gel technique in the technology of planar waveguide sensors

P. Karasiński

Department of Optoelectronics (RE/RE4)

Research output: Contribution to journal › Conference article › peer-review

3 Citations (Scopus)

Abstract

The work discusses the application potentials of sol-gel technique in the technology of planar waveguide sensors. The capability to form refractive profiles with the use of various techniques applied in planar optics have been compared. The authors present the results of investigation studies involving the application of sol-gel technique of the oxide system SiO₂:TiO₂ for the formation of sensor layers, mask layers and waveguide layers. The influence of the thickness of waveguide layer and of its refractive index on the sensitivity of the meter measuring the refractive index changes and working in the difference interferometer system has been investigated.

Original language	English
Pages (from-to)	15-20
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4516
DOIs	https://doi.org/10.1117/12.435923
Publication status	Published - 2001
Event	Optoelectronic and Electronic Sensors IV - Gliwice, Poland Duration: 13 Jun 2000 → 16 Jun 2000

Keywords

Difference interferometer
Optical waveguide
Planar sensor
Sol-gel

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.435923

Cite this

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abstract = "The work discusses the application potentials of sol-gel technique in the technology of planar waveguide sensors. The capability to form refractive profiles with the use of various techniques applied in planar optics have been compared. The authors present the results of investigation studies involving the application of sol-gel technique of the oxide system SiO2:TiO2 for the formation of sensor layers, mask layers and waveguide layers. The influence of the thickness of waveguide layer and of its refractive index on the sensitivity of the meter measuring the refractive index changes and working in the difference interferometer system has been investigated.",

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AB - The work discusses the application potentials of sol-gel technique in the technology of planar waveguide sensors. The capability to form refractive profiles with the use of various techniques applied in planar optics have been compared. The authors present the results of investigation studies involving the application of sol-gel technique of the oxide system SiO2:TiO2 for the formation of sensor layers, mask layers and waveguide layers. The influence of the thickness of waveguide layer and of its refractive index on the sensitivity of the meter measuring the refractive index changes and working in the difference interferometer system has been investigated.

KW - Difference interferometer

KW - Optical waveguide

KW - Planar sensor

KW - Sol-gel

UR - https://www.scopus.com/pages/publications/0034757265

U2 - 10.1117/12.435923

DO - 10.1117/12.435923

M3 - Conference article

AN - SCOPUS:0034757265

SN - 0277-786X

VL - 4516

SP - 15

EP - 20

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optoelectronic and Electronic Sensors IV

Y2 - 13 June 2000 through 16 June 2000

ER -

Application of dielectric layers made in sol-gel technique in the technology of planar waveguide sensors

Abstract

Keywords

ASJC Scopus subject areas

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