A new type of electron energy analyzer based on three coaxial cylindrical electrodes for Auger electron spectroscopy

A new type of an electron energy analyzer for Auger electron spectroscopy (AES) constructed in our laboratory on the basis of theoretical predictions of Menchikov is described. It consists of three coaxial cylindrical electrodes for separation of the secondary electrons emitted from the excited substrate. After a short description of the fundamentals including the electron trajectory inside an analyzer the details of calculations of geometrical parameters of our construction are presented. Based on the assumed distance from the sample to image of 200 mm, an analyzer constant of 2, and theoretical energy resolution of 0.03%, the entrance angle of an analyzer was calculated as α = 33°55′ ± 6°. Using a constructed analyzer in combination with a glancing incidence (15°) scanning electron gun, the Auger electron carbon C-272 eV peak was recorded for the chemically etched Si(1 1 1) substrate in the E N(E) mode and then numerically differentiated to the E dN(E)/dE in order to test the possibility of the constructed AES-TCMA spectrometer for Auger line shape analysis.